Recent Progress in ULSI Lithography
نویسندگان
چکیده
منابع مشابه
Recent Developments, Issues and Challenges for Lithography in ULSI Fabrication
Nanofabrication is the core task performed and constantly further developed by today’s and future semiconductor industry. Optimization of throughput and minimizing process cost and complexity thus increasing fabrication reliability constitute the main challenges within this development. As integrated circuits continue to go smaller, laying down circuit patterns on semiconductor material becomes...
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ژورنال
عنوان ژورنال: IEEJ Transactions on Fundamentals and Materials
سال: 2002
ISSN: 0385-4205,1347-5533
DOI: 10.1541/ieejfms.122.9